| 11946470 |
Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method |
Keiji Maishigi, Tetsuro Sugiura, Masahiro Hatakeyama, Chikako Honma, Toru Osuga +2 more |
2024-04-02 |
| 8251678 |
Vacuum pump unit |
Takashi Hozumi, Nobuhito Miyashita, Takanori Inada, Kozo Matake, Yoshinori Ojima +1 more |
2012-08-28 |
| 7360454 |
Flowmeter having a float and a displacement sensor |
Hiroyasu Kawashima, Hiroaki Ogamino, Toshiharu Nakazawa |
2008-04-22 |
| 6761542 |
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor |
Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama +1 more |
2004-07-13 |
| 6474949 |
Evacuating unit with reduced diameter exhaust duct |
Satoshi Arai, Takahiro Isozaki |
2002-11-05 |
| 6447271 |
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor |
Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama +1 more |
2002-09-10 |
| 6183218 |
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor |
Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama +1 more |
2001-02-06 |
| 6164945 |
Vacuum pump rotor and method of manufacturing the same |
Yoshimitsu Ishibashi, Satoshi Arai |
2000-12-26 |
| 6088508 |
Method of operating vacuum pump |
Yoshimitsu Ishibashi |
2000-07-11 |
| 5816782 |
Multistage positive-displacement vacuum pump |
Masami Nagayama, Hiroaki Ogamino |
1998-10-06 |
| 5814913 |
Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor |
Yoshinori Ojima, Kozo Matake, Genichi Sato, Yasushi Hisabe, Masami Nagayama +1 more |
1998-09-29 |
| 5779453 |
Vacuum pump motor arrangement having reduced heat generation |
Masami Nagayama, Kozo Matake, Yoshinori Ojima, Genichi Sato, Yasushi Hisabe |
1998-07-14 |
| 5641054 |
Magnetic levitation conveyor apparatus |
Satoshi Mori, Masao Matsumura, Yoichi Kanemitsu, Takeshi Yoshioka, Masaaki Kajiyama +9 more |
1997-06-24 |
| 4943214 |
Two-shaft type rotary machine having a tip circle diameter to shaft diameter within a certain range |
Yoshihiro Niimura, Ritsuo Kikuta |
1990-07-24 |