Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8172515 | Turbo vacuum pump | Shinichi Sekiguchi | 2012-05-08 |
| 8066495 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same | Shinichi Sekiguchi, Hiroaki Ogamino | 2011-11-29 |
| 7717684 | Turbo vacuum pump and semiconductor manufacturing apparatus having the same | Shinichi Sekiguchi, Hiroaki Ogamino | 2010-05-18 |
| 7360454 | Flowmeter having a float and a displacement sensor | Hiroaki Ogamino, Katsuaki Usui, Toshiharu Nakazawa | 2008-04-22 |