Issued Patents All Time
Showing 51–75 of 92 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D743455 | Dresser disk | — | 2015-11-17 |
| D743456 | Dresser disk | Toshiro Maekawa | 2015-11-17 |
| 9156122 | Method and apparatus for monitoring a polishing surface of a polishing pad used in polishing apparatus | Takahiro SHIMANO, Akira Imamura, Nakamura Akira | 2015-10-13 |
| 9132525 | Polishing apparatus for flattening surface of workpiece | — | 2015-09-15 |
| D737873 | Dresser disk | — | 2015-09-01 |
| D730960 | Dressing pellet for dresser disk | — | 2015-06-02 |
| D722331 | Dressing pellet for dresser disk | — | 2015-02-10 |
| 8807914 | Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber | — | 2014-08-19 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Junji Kunisawa, Kenichi Kobayashi +5 more | 2014-08-05 |
| 8517796 | Dressing apparatus, dressing method, and polishing apparatus | — | 2013-08-27 |
| 7232286 | Seal device and method for operating the same and substrate processing apparatus comprising a vacuum chamber | — | 2007-06-19 |
| 7134668 | Differential pumping seal apparatus | — | 2006-11-14 |
| 7025005 | Stage device and angle detecting device | Hirosi Sobukawa, Shoji Yoshikawa | 2006-04-11 |
| 6809449 | Controlled magnetic bearing apparatus | — | 2004-10-26 |
| 6809448 | Excimer laser apparatus | Natsushi Suzuki, Hisashi Nara, Shunsuke Yoshioka, Toshimitsu Barada, Atsushi Ooyama +2 more | 2004-10-26 |
| 6785314 | Electric discharge gas laser | Atushi Ooyama, Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa | 2004-08-31 |
| 6657345 | Magnetic bearing controller | — | 2003-12-02 |
| 6603787 | Discharge-pumped excimer laser device | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa | 2003-08-05 |
| 6570285 | Magnetic bearing apparatus having a protective non-magnetic can | — | 2003-05-27 |
| 6539043 | Discharge-pumped excimer laser device | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa | 2003-03-25 |
| 6519273 | Magnetic bearing and circulation fan apparatus | Shinichi Sekiguchi, Shunichi Aiyoshizawa, Toshimitsu Barada, Atsushi Ooyama | 2003-02-11 |
| 6515387 | Controlled magnetic bearing device | — | 2003-02-04 |
| 6464472 | Circulation fan apparatus and circulation-fan driving motor | Shinichi Sekiguchi, Toshimitsu Barada, Toshiharu Nakazawa, Takeshi Kawamura | 2002-10-15 |
| 6464825 | Substrate processing apparatus including a magnetically levitated and rotated substrate holder | — | 2002-10-15 |
| 6440320 | Substrate processing method and apparatus | — | 2002-08-27 |