| 7341634 |
Apparatus for and method of processing substrate |
Toshio Yokoyama, Masahiko Sekimoto, Akira Ogata, Hiroaki Inoue |
2008-03-11 |
| 7235135 |
Substrate processing apparatus and substrate processing method |
Mitsuru Miyazaki, Teruyuki Watanabe, Yasuyuki Motojima |
2007-06-26 |
| 7101255 |
Polishing apparatus |
Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa |
2006-09-05 |
| 7087117 |
Substrate processing apparatus and substrate processing method |
Masahiko Sekimoto, Toshio Yokoyama, Teruyuki Watanabe, Takahiro Ogawa, Kenichi Kobayashi +4 more |
2006-08-08 |
| 6918814 |
Polishing apparatus |
Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa |
2005-07-19 |
| 6844274 |
Substrate holder, plating apparatus, and plating method |
Junichiro Yoshioka, Masahiko Sekimoto, Yasuhiko Endo, Yugang Guo |
2005-01-18 |
| 6629883 |
Polishing apparatus |
Masahiko Sekimoto, Mitsuru Miyazaki, Naoki Noji, Kazuki Chiba, Kenji Fujimoto |
2003-10-07 |
| 6435949 |
Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof |
Hozumi Yasuda, Tadakazu Sone, Shunichiro Kojima, Manabu Tsujimura |
2002-08-20 |
| 6413146 |
Polishing apparatus |
Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa |
2002-07-02 |
| 6413357 |
Polishing apparatus |
Tetsuji Togawa, Norio Kimura, Toyomi Nishi |
2002-07-02 |
| 6402597 |
Polishing apparatus and method |
Kunihiko Sakurai |
2002-06-11 |
| 6354918 |
Apparatus and method for polishing workpiece |
Tetsuji Togawa, Nobuyuki Takada, Kenichi Shigeta |
2002-03-12 |
| 6332826 |
Polishing apparatus |
Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa |
2001-12-25 |
| 6312312 |
Polishing apparatus |
Tetsuji Togawa, Nobuyuki Takada, Hiroyuki Osawa |
2001-11-06 |
| 6293858 |
Polishing device |
Norio Kimura, Toru Maruyama, Shunichiro Kojima, Shin Ohwada |
2001-09-25 |
| 6139677 |
Polishing apparatus |
Tetsuji Togawa, Norio Kimura, Toyomi Nishi |
2000-10-31 |
| 5931723 |
Polishing apparatus |
Toyomi Nishi, Tetsuji Togawa |
1999-08-03 |
| 5860847 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa, Toyomi Nishi, Hiromi Yajima, Masako Kodera |
1999-01-19 |
| 5839947 |
Polishing apparatus |
Norio Kimura, Kunihiko Sakurai, Tetsuji Togawa, Toyomi Nishi |
1998-11-24 |
| 5647792 |
Polishing apparatus |
Kunihiko Sakurai, Tetsuji Togawa |
1997-07-15 |
| 5643067 |
Dressing apparatus and method |
Kunihiko Sakurai, Tetsuji Togawa |
1997-07-01 |