Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9687957 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2017-06-27 |
| 9673067 | Substrate processing apparatus and processed substrate manufacturing method | Toshio Yokoyama, Mitsuru Miyazaki, Teruaki HOMBO, Naoki Toyomura | 2017-06-06 |
| 9530676 | Substrate processing apparatus, substrate transfer method and substrate transfer device | Toshio Yokoyama, Mitsuru Miyazaki, Kenichi Suzuki, Hiroshi Sotozaki | 2016-12-27 |
| 9358662 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2016-06-07 |
| 9269605 | Substrate gripping apparatus | Mitsuru Miyazaki, Naoki Matsuda, Manao Hoshina | 2016-02-23 |
| 8795032 | Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method | Mitsuru Miyazaki, Seiji Katsuoka, Naoki Matsuda, Kenichi Kobayashi, Hiroshi Sotozaki +5 more | 2014-08-05 |
| 8029653 | Electroplating apparatus and electroplating method | Satoru Yamamoto, Keiichi Kurashina, Takashi Kawakami, Tsutomu Nakada, Hiroyuki Kanda +1 more | 2011-10-04 |
| 7976362 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Mitsuru Miyazaki, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2011-07-12 |
| 7901550 | Plating apparatus | Natsuki Makino, Keisuke Namiki, Kunihito Ide, Katsuyuki Musaka | 2011-03-08 |
| 7736474 | Plating apparatus and plating method | Keiichi Kurashina, Mizuki Nagai, Satoru Yamamoto, Hiroyuki Kanda, Koji Mishima +7 more | 2010-06-15 |
| 7585205 | Substrate polishing apparatus and method | Seiji Katsuoka, Masahiko Sekimoto, Mitsuru Miyazaki, Teruyuki Watanabe, Kenichi Kobayashi +2 more | 2009-09-08 |
| 7442282 | Electrolytic processing apparatus and method | Natsuki Makino | 2008-10-28 |
| 7387717 | Method of performing electrolytic treatment on a conductive layer of a substrate | Mitsuko Odagaki, Natsuki Makino, Koji Mishima, Kenji Nakamura, Hiroaki Inoue +7 more | 2008-06-17 |
| 7208074 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Natsuki Makino, Norio Kimura, Hiroaki Inoue, Kenji Nakamura +3 more | 2007-04-24 |
| 7108589 | Polishing apparatus and method | Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, You Ishii, Hiroyuki Yano | 2006-09-19 |
| 7055535 | Holding unit, processing apparatus and holding method of substrates | Norio Kimura, Kenya Ito, Akira Fukunaga, Yuuki Inoue, Hiroshi Tomita +2 more | 2006-06-06 |
| 6935932 | Polishing apparatus and method | Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, You Ishii, Hiroyuki Yano | 2005-08-30 |
| 6858084 | Plating apparatus and method | Hiroaki Inoue, Koji Mishima, Tsutomu Karimata, Kenji Nakamura, Moriji Matsumoto | 2005-02-22 |
| 6767437 | Electroplating apparatus and electroplating method | Tetsuo Matsuda, Hisashi Kaneko, Koji Mishima, Natsuki Makino | 2004-07-27 |
| 6746589 | Plating method and plating apparatus | Koji Mishima, Hiroaki Inoue, Natsuki Makino, Kenji Nakamura, Tetsuo Matsuda +2 more | 2004-06-08 |
| 6722964 | Polishing apparatus and method | Norio Kimura, Mitsuhiko Shirakashi, Katsuya Okumura, You Ishii, Hiroyuki Yano | 2004-04-20 |
| 6689257 | Substrate processing apparatus and substrate plating apparatus | Koji Mishima, Natsuki Makino, Norio Kimura, Hiroaki Inoue, Kenji Nakamura +3 more | 2004-02-10 |
| 6632335 | Plating apparatus | Mitsuko Odagaki, Natsuki Makino, Koji Mishima, Kenji Nakamura, Hiroaki Inoue +7 more | 2003-10-14 |
| 6558239 | Polishing apparatus | Norio Kimura | 2003-05-06 |