Issued Patents All Time
Showing 51–75 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7967665 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2011-06-28 |
| D634719 | Elastic membrane for semiconductor wafer polishing apparatus | Hozumi Yasuda, Keisuke Namiki, Makoto Fukushima, Osamu Nabeya, Koji Saito +3 more | 2011-03-22 |
| 7883394 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Kenji Iwade, Yoshikuni Tateyama | 2011-02-08 |
| 7867063 | Substrate holding apparatus and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2011-01-11 |
| 7854646 | Substrate polishing apparatus and substrate polishing method | Koichi Fukaya, Mitsuo Tada, Taro Takahashi, Yasunari Suto | 2010-12-21 |
| 7850509 | Substrate holding apparatus | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2010-12-14 |
| 7850817 | Polishing device and substrate processing device | Satoshi Wakabayashi, Ryuichi Kosuge, Koji Ato, Hiroshi Sotozaki | 2010-12-14 |
| 7708618 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Hiromi Yajima, Yukio Imoto, Shoichi Kodama, Riichiro Aoki, Takashi Omichi +1 more | 2010-05-04 |
| 7670206 | Substrate polishing apparatus and substrate polishing method | Koichi Fukaya, Mitsuo Tada, Taro Takahashi, Yasunari Suto | 2010-03-02 |
| 7635292 | Substrate holding device and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2009-12-22 |
| 7632173 | Substrate holding apparatus and polishing apparatus | Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida, Teruhiko Ichimura | 2009-12-15 |
| 7632378 | Polishing apparatus | Kunihiko Sakurai, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2009-12-15 |
| 7491117 | Substrate holding apparatus | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2009-02-17 |
| 7465214 | Substrate holding apparatus and polishing apparatus | Osamu Nabeya | 2008-12-16 |
| 7458879 | Dressing apparatus and substrate holding apparatus | — | 2008-12-02 |
| 7448940 | Polishing apparatus and polishing method | — | 2008-11-11 |
| 7419420 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Kenji Iwade, Yoshikuni Tateyama | 2008-09-02 |
| 7361076 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama, Kazuto Hirokawa +1 more | 2008-04-22 |
| 7357699 | Substrate holding apparatus and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2008-04-15 |
| 7311585 | Substrate holding apparatus and polishing apparatus | Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida, Teruhiko Ichimura | 2007-12-25 |
| 7234999 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama, Kazuto Hirokawa +1 more | 2007-06-26 |
| 7223690 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Yoko Suzuki, Hiroaki Inoue | 2007-05-29 |
| 7217175 | Polishing apparatus and polishing method | — | 2007-05-15 |
| 7207862 | Polishing apparatus and method for detecting foreign matter on polishing surface | Osamu Nabeya | 2007-04-24 |
| 7198552 | Polishing apparatus | Toyomi Nishi, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2007-04-03 |