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Display device including seal material with improved adhesion strength for bonding two substrates together |
Hideaki Sakai, Shigeki Kitamura, Hiroaki Ito |
2016-04-05 |
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Substrate holding apparatus and polishing apparatus |
Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida |
2009-12-15 |
| 7311585 |
Substrate holding apparatus and polishing apparatus |
Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida |
2007-12-25 |
| 7163895 |
Polishing method |
Tetsuji Togawa, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida, Osamu Nabeya |
2007-01-16 |
| 7033260 |
Substrate holding device and polishing device |
Tetsuji Togawa, Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida |
2006-04-25 |
| 6435956 |
Wafer holder and polishing device |
Shin Ohwada |
2002-08-20 |
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Polishing apparatus |
— |
2002-07-30 |
| 5496749 |
Method of manufacturing thin film transistors in a liquid crystal display apparatus |
Yasuhiro Nasu, Tomotaka Matsumoto |
1996-03-05 |
| 5496752 |
Method of manufacturing thin film transistors in a liquid crystal display apparatus |
Yasuhiro Nasu, Tomotaka Matsumoto |
1996-03-05 |
| 5480818 |
Method for forming a film and method for manufacturing a thin film transistor |
Tomotaka Matsumoto, Jun Inoue, Yuji Murata, Junichi Watanabe, Yoshio Nagahiro +3 more |
1996-01-02 |
| 5462885 |
Method of manufacturing thin film transistors in a liquid crystal display apparatus |
Yasuhiro Nasu, Tomotaka Matsumoto |
1995-10-31 |
| 5407845 |
Method of manufacturing thin film transistors in a liquid crystal display apparatus |
Yasuhiro Nasu, Tomotaka Matsumoto |
1995-04-18 |
