Issued Patents All Time
Showing 26–50 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9566616 | Substrate processing apparatus | Kenya Ito, Yu Ishii, Keisuke Uchiyama | 2017-02-14 |
| 9561573 | Polishing apparatus | Masaya Seki | 2017-02-07 |
| 9457448 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2016-10-04 |
| 9457447 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi | 2016-10-04 |
| 9399274 | Wafer polishing method | Atsushi Yoshida, Toshifumi Watanabe | 2016-07-26 |
| 9308621 | Method and apparatus for polishing a substrate | Makoto Fukushima, Shingo Saito, Tomoshi Inoue | 2016-04-12 |
| 9248545 | Substrate processing apparatus and substrate processing method | Masaya Seki, Masayuki Nakanishi, Kenya Ito | 2016-02-02 |
| 9248543 | Method of detecting abnormality in polishing of a substrate and polishing apparatus | Masaya Seki, Hiroyuki Takenaka | 2016-02-02 |
| 8979615 | Polishing apparatus and polishing method | Masaya Seki, Masayuki Nakanishi, Naoki Matsuda, Atsushi Yoshida | 2015-03-17 |
| 8870625 | Method and apparatus for dressing polishing pad, profile measuring method, substrate polishing apparatus, and substrate polishing method | Keisuke Namiki, Satoru Yamaki | 2014-10-28 |
| 8845396 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima, Hozumi Yasuda | 2014-09-30 |
| 8748289 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Kenya Ito, Masaya Seki, Kenji Iwade, Takeo Kubota | 2014-06-10 |
| 8641480 | Polishing apparatus and polishing method | Masayuki Nakanishi, Kenya Ito, Masaya Seki, Kenji Iwade, Takeo Kubota +1 more | 2014-02-04 |
| 8485866 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2013-07-16 |
| 8445360 | Method for manufacturing semiconductor device | Masayuki Nakanishi, Kenya Ito, Masaya Seki, Kenji Iwade, Takeo Kubota | 2013-05-21 |
| 8430716 | Polishing method and polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Osamu Nabeya, Shingo Saito | 2013-04-30 |
| 8357029 | Polishing apparatus | Makoto Fukushima, Hozumi Yasuda, Koji Saito, Osamu Nabeya, Tomoshi Inoue | 2013-01-22 |
| 8292694 | Substrate holding mechanism, substrate polishing apparatus and substrate polishing method | Toshio Watanabe, Hiroyuki Yano, Gen Toyota, Kenji Iwade, Yoshikuni Tateyama | 2012-10-23 |
| 8267746 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2012-09-18 |
| 8152594 | Polishing apparatus | Kenichiro Saito, Osamu Nabeya, Kimihide Nagata | 2012-04-10 |
| 8100743 | Polishing apparatus | Osamu Nabeya, Hozumi Yasuda, Koji Saito, Makoto Fukushima | 2012-01-24 |
| 8100739 | Substrate holding apparatus, polishing apparatus, and polishing method | Hozumi Yasuda, Osamu Nabeya, Kenichiro Saito, Makoto Fukushima, Tomoshi Inoue | 2012-01-24 |
| 8083571 | Polishing apparatus | Osamu Nabeya, Makoto Fukushima | 2011-12-27 |
| 8070560 | Polishing apparatus and method | Hozumi Yasuda, Makoto Fukushima | 2011-12-06 |
| 7988537 | Substrate holding apparatus and polishing apparatus | Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima, Koichi Fukaya | 2011-08-02 |