Issued Patents All Time
Showing 76–100 of 147 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7163895 | Polishing method | Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida, Osamu Nabeya, Teruhiko Ichimura | 2007-01-16 |
| 7156725 | Substrate polishing machine | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2007-01-02 |
| 7150673 | Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus | Kunihiko Sakurai, Yoshihiro Mochizuki, Akira Fukuda, Hirokuni Hiyama, Kazuto Hirokawa +1 more | 2006-12-19 |
| 7108581 | Polishing apparatus | — | 2006-09-19 |
| 7108592 | Substrate holding apparatus and polishing apparatus | Koichi Fukaya, Hiroshi Yoshida, Osamu Nabeya, Makoto Fukushima | 2006-09-19 |
| 7083507 | Substrate holding apparatus | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2006-08-01 |
| 7048609 | Pressure control system and polishing apparatus | — | 2006-05-23 |
| 7033260 | Substrate holding device and polishing device | Osamu Nabeya, Makoto Fukushima, Kunihiko Sakurai, Hiroshi Yoshida, Teruhiko Ichimura | 2006-04-25 |
| 6997782 | Polishing apparatus and a method of polishing and cleaning and drying a wafer | Toyomi Nishi, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2006-02-14 |
| 6957998 | Polishing apparatus | — | 2005-10-25 |
| 6953390 | Polishing apparatus | Kunihiko Sakurai, Hiroshi Yoshida | 2005-10-11 |
| 6942541 | Polishing apparatus | Kunihiko Sakurai, Ritsuo Kikuta | 2005-09-13 |
| 6926585 | Pressure control system and polishing apparatus | — | 2005-08-09 |
| 6899604 | Dressing apparatus and polishing apparatus | Ikutaro Noji, Shunichiro Kojima, Nobuyuki Takada | 2005-05-31 |
| 6878044 | Polishing apparatus | Kunihiko Sakurai, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2005-04-12 |
| 6852019 | Substrate holding apparatus | Ikutaro Noji, Keisuke Namiki, Hozumi Yasuda, Shunichiro Kojima, Kunihiko Sakurai +4 more | 2005-02-08 |
| 6828225 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Yoko Suzuki, Hiroaki Inoue | 2004-12-07 |
| 6790763 | Substrate processing method | Fumio Kondo, Koji Mishima, Akira Tanaka, Yoko Suzuki, Hiroaki Inoue | 2004-09-14 |
| 6783440 | Polishing apparatus | Osamu Nabeya | 2004-08-31 |
| 6682408 | Polishing apparatus | Kunihiko Sakurai, Nobuyuki Takada, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2004-01-27 |
| 6609962 | Dressing apparatus and polishing apparatus | Satoshi Wakabayashi, Kuniaki Yamaguchi, Nobuyuki Takada, Osamu Nabeya | 2003-08-26 |
| 6607427 | Dressing apparatus and polishing apparatus | Osamu Nabeya | 2003-08-19 |
| RE38215 | Polishing apparatus | Miki Shibata, Toyomi Nishi, Hidetaka Nakao | 2003-08-12 |
| 6602119 | Dressing apparatus | Kuniaki Yamaguchi, Nobuyuki Takada, Satoshi Wakabayashi | 2003-08-05 |
| 6578891 | Substrate holder and substrate transfer apparatus using the same | Hiroo Suzuki, Kenya Ito, Kunihiko Sakurai, Satoshi Wakabayashi | 2003-06-17 |