Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12032281 | Pellicle cleaning apparatus and pellicle cleaning method using the same | Byunghoon Lee, Jin Goo Park, Tae Gon Kim, Sanguk Park, Changyoung Jeong +1 more | 2024-07-09 |
| 11940726 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jung-Hwan Kim, Seongchul Hong | 2024-03-26 |
| 11402746 | Mask protective module, pellicle having the same, and lithography apparatus having the same | Jung-Hwan Kim, Seongchul Hong | 2022-08-02 |
| 10061190 | Mask for extreme ultraviolet lithography process and method of fabricating the same | Jung Sik Kim, Seongchul Hong, Hyun Min Song, Jae Uk Lee, Seung Min Lee +1 more | 2018-08-28 |
| 9958770 | Pellicle for EUV lithography | Jaeuk LEE, Seongchul Hong, Seungmin LEE, Kilbock Lee, Jungsik Kim +1 more | 2018-05-01 |
| 9506089 | Microorganism having novel acrylic acid synthesis pathway and method of producing acrylic acid by using the microorganism | Hunsu Chu, Taewook Nam, Jiae Yun, Insuk Choi, Yeoju Song +1 more | 2016-11-29 |