Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274820 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Sungwon Kwon, Byunggook Kim, Roman Chalykh, Yongseok Jung +1 more | 2019-04-30 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Hwanchul JEON, Sungwon Kwon, Byunggook Kim, Roman Chalykh, Yongseok Jung +1 more | 2018-04-24 |
| 9753367 | Methods of fabricating pellicles using supporting layer | Ji-Beom Yoo, Sooyoung Kim, Taesung Kim, Dong Wook Shin, Hwanchul JEON +1 more | 2017-09-05 |
| 9612528 | Methods of manufacturing pellicles having graphite layers | Byunggook Kim, Jaehyuck Choi | 2017-04-04 |