Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10274820 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh, Yongseok Jung +1 more | 2019-04-30 |
| 9952502 | Pellicle for preventing thermal accumulation and extreme ultra-violet lithography apparatus having the same | Munja Kim, Sungwon Kwon, Byunggook Kim, Roman Chalykh, Yongseok Jung +1 more | 2018-04-24 |
| 9753367 | Methods of fabricating pellicles using supporting layer | Munja Kim, Ji-Beom Yoo, Sooyoung Kim, Taesung Kim, Dong Wook Shin +1 more | 2017-09-05 |