| 9063414 |
Photoresist composition |
Koji Ichikawa, Takahiro Yasue |
2015-06-23 |
| 8900790 |
Photoresist composition |
Tatsuro Masuyama |
2014-12-02 |
| 8546059 |
Photoresist composition |
Koji Ichikawa, Takayuki Miyagawa |
2013-10-01 |
| 8475999 |
Compound and photoresist composition containing the same |
Tatsuro Masuyama |
2013-07-02 |
| 8476473 |
Compound, method for preparing the compound and resist composition containing the compound |
Ichiki Takemoto, Nobuo Ando |
2013-07-02 |
| 8062829 |
Chemically amplified resist composition and chemically amplified resist composition for immersion lithography |
Yusuke Fuji, Takayuki Miyagawa |
2011-11-22 |
| 8048612 |
Polymer and chemically amplified resist composition comprising the same |
Yusuke Fuji |
2011-11-01 |
| 7985529 |
Mask patterns including gel layers for semiconductor device fabrication |
Hyun-Woo Kim, Jung-hwan Hah, Sang-Gyun Woo |
2011-07-26 |
| 7981985 |
Polymer and chemically amplified resist composition comprising the same |
Yusuke Fuji |
2011-07-19 |
| 7855038 |
Mask patterns for semiconductor device fabrication and related methods and structures |
Jung-hwan Hah, Hyun-Woo Kim, Sang-Gyun Woo |
2010-12-21 |
| 7642042 |
Polymer, top coating layer, top coating composition and immersion lithography process using the same |
Sang-jun Choi, Sang-Gyun Woo, Man-Hyoung Ryoo |
2010-01-05 |
| 7604911 |
Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating, composition for fine pattern formation, and method of fabricating semiconductor device |
Jung-hwan Hah, Hyun-Woo Kim, Sang-Gyun Woo |
2009-10-20 |
| 7468235 |
Barrier coating compositions containing fluorine and methods of forming photoresist patterns using such compositions |
Sang-jun Choi, Man-Hyoung Ryoo |
2008-12-23 |
| 7384730 |
Top coating composition for photoresist and method of forming photoresist pattern using same |
Man-Hyoung Ryoo, Sang-Gyun Woo, Hyun-Woo Kim, Jin Young Yoon, Jung-hwan Hah |
2008-06-10 |
| 7361609 |
Mask patterns for semiconductor device fabrication and related methods |
Jung-hwan Hah, Hyun-Woo Kim, Sang-Gyun Woo |
2008-04-22 |
| 7361612 |
Barrier coating compositions containing silicon and methods of forming photoresist patterns using the same |
Sang-jun Choi, Han-ku Cho |
2008-04-22 |
| 7314691 |
Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating composition for fine pattern formation, and method of fabricating semiconductor device |
Jung-hwan Hah, Hyun-Woo Kim, Sang-Gyun Woo |
2008-01-01 |
