Issued Patents All Time
Showing 26–50 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7575855 | Method of forming pattern | Cha-Won Koh, Gi-Sung Yeo, Myoung-Ho Jung | 2009-08-18 |
| 7560768 | Nonvolatile memory device and method of manufacturing the same | Cha-Won Koh, Byung-Hong Chung, Jeong-Lim Nam, Seok-Hwan Oh, Jai-Hyuk Song +2 more | 2009-07-14 |
| 7550383 | Methods of performing a photolithography process for forming asymmetric patterns and methods of forming a semiconductor device using the same | Joon-soo Park, Gi-Sung Yeo, Han-ku Cho, Tae-Young Kim, Byeong-Soo Kim | 2009-06-23 |
| 7547936 | Semiconductor memory devices including offset active regions | Doo-Hoon Goo, Han-ku Cho, Joo-tae Moon, Gi-Sung Yeo, Kyoung-Yun Baek | 2009-06-16 |
| 7540970 | Methods of fabricating a semiconductor device | Cha-Won Koh, Jeong-Lim Nam, Kyeong-Koo Chi, Seok-Hwan Oh, Gi-Sung Yeo +2 more | 2009-06-02 |
| 7473647 | Method of forming pattern using fine pitch hard mask | Ji-Young Lee, Joon-soo Park | 2009-01-06 |
| 7403276 | Photomask for measuring lens aberration, method of its manufacture, and method of its use | Jang-Ho Shin, Han-ku Cho, Suk-Joo Lee | 2008-07-22 |
| 7387869 | Method of forming pattern for semiconductor device | Cha-Won Koh, Byeong-Soo Kim | 2008-06-17 |
| 7384730 | Top coating composition for photoresist and method of forming photoresist pattern using same | Mitsuhiro Hata, Man-Hyoung Ryoo, Hyun-Woo Kim, Jin Young Yoon, Jung-hwan Hah | 2008-06-10 |
| 7361609 | Mask patterns for semiconductor device fabrication and related methods | Jung-hwan Hah, Hyun-Woo Kim, Mitsuhiro Hata | 2008-04-22 |
| 7335455 | Method of forming an underlayer of a bi-layer resist film and method of fabricating a semiconductor device using the same | Hyun-Woo Kim, Jin Hong, Myoung-Ho Jung | 2008-02-26 |
| 7314702 | Composition for a bottom-layer resist | Sung Ho Lee, Jin-Gi Hong | 2008-01-01 |
| 7314691 | Mask pattern for semiconductor device fabrication, method of forming the same, method for preparing coating composition for fine pattern formation, and method of fabricating semiconductor device | Mitsuhiro Hata, Jung-hwan Hah, Hyun-Woo Kim | 2008-01-01 |
| 7297466 | Method of forming a photoresist pattern and method for patterning a layer using a photoresist | Sung Ho Lee, Yun-sook Chae, Ji Soo Kim | 2007-11-20 |
| 7259065 | Method of forming trench in semiconductor device | Doo-Hoon Goo, Si-hyeung Lee, Han-ku Cho, Gi-Sung Yeo | 2007-08-21 |
| 7241552 | Resist composition comprising photosensitive polymer having lactone in its backbone | Kwang-Sub Yoon, Dong-won Jung, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee +1 more | 2007-07-10 |
| 7221014 | DRAM devices having an increased density layout | Doo-Hoon Goo, Jung-hyeon Lee, Gi-Sung Yeo, Han-ku Cho | 2007-05-22 |
| 7202011 | Photosensitive polymer including fluorine and resist composition containing the same | Kwang-Sub Yoon, Ki Yong Song, Sang-jun Choi | 2007-04-10 |
| 7045267 | Resist composition comprising photosensitive polymer having lactone in its backbone | Kwang-Sub Yoon, Dong-won Jung, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee +1 more | 2006-05-16 |
| 6964839 | Photosensitive polymer having cyclic backbone and resist composition containing the same | Sang-jun Choi, Hyun-Woo Kim, Joo-tae Moon | 2005-11-15 |
| 6962768 | Ether monomers and polymers having multi-ring structures, and photosensitive polymers and resist compositions obtained from the same | Hyun-Woo Kim | 2005-11-08 |
| 6844134 | Photosenseitive polymer having fluorinated ethylene glycol group and chemically amplified resist composition comprising the same | Sang-jun Choi, Joo-tae Moon, Kwang-Sub Yoon, Ki Yong Song | 2005-01-18 |
| 6835529 | Polymer having butadiene sulfone repeating unit and resist composition comprising the same | Sang-jun Choi, Woo-Sung Han | 2004-12-28 |
| 6803176 | Methods for forming line patterns in semiconductor substrates | Sang-jun Choi, Yool Kang, Joo-tae Moon, Jeong-hee Chung | 2004-10-12 |
| 6800418 | Fluorine-containing photosensitive polymer having hydrate structure and resist composition comprising the same | Kwang-Sub Yoon, Ki Yong Song, Sang-jun Choi | 2004-10-05 |