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Overlay measurement device and method, and system and program therefor |
Sol-Lee Hwang, Hee-Chul Lim, Min Ho Lee, Hyun-Kyoo Shon |
2025-06-24 |
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Overlay measurement device and method, and system and program therefor |
Sol-Lee Hwang, Hee-Chul Lim, Min Ho Lee, Hyun-Kyoo Shon |
2025-06-17 |
| 12235590 |
Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor |
Sol-Lee Hwang, Hee-Chul Lim, Hyun-Kyoo Shon, Min Ho Lee |
2025-02-25 |
| 12169364 |
Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor |
Sol-Lee Hwang, Hee-Chul Lim, Hyun-Kyoo Shon, Min Ho Lee |
2024-12-17 |
| 12169365 |
Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor |
Sol-Lee Hwang, Hee-Chul Lim, Hyun-Kyoo Shon, Min Ho Lee |
2024-12-17 |
| 12009243 |
Overlay measurement device and method, and system and program therefor |
Sol-Lee Hwang, Hee-Chul Lim, Min Ho Lee, Hyun-Kyoo Shon |
2024-06-11 |
| 11960214 |
Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor |
Sol-Lee Hwang, Hee-Chul Lim, Hyun-Kyoo Shon, Min Ho Lee |
2024-04-16 |
| 10252310 |
Tube flanging method |
— |
2019-04-09 |
| 7241552 |
Resist composition comprising photosensitive polymer having lactone in its backbone |
Kwang-Sub Yoon, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more |
2007-07-10 |
| 7084227 |
Photosensitive polymer and chemically amplified photoresist composition containing the same |
Sang-jun Choi, Si-hyeung Lee, Sook Lee |
2006-08-01 |
| 7045267 |
Resist composition comprising photosensitive polymer having lactone in its backbone |
Kwang-Sub Yoon, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more |
2006-05-16 |
| 6893793 |
Photosensitive polymer and chemically amplified photoresist composition containing the same |
Sang-jun Choi, Si-hyeung Lee, Sook Lee |
2005-05-17 |
| 6642336 |
Photosensitive polymer |
Sook Lee, Ki Young Kwon, Si-hyeung Lee, Kwang-Sub Yoon, Hyun-Woo Kim +2 more |
2003-11-04 |
| 6596459 |
Photosensitive polymer and resist composition containing the same |
Hyun-Woo Kim, Ki Young Kwon, Si-hyeung Lee, Sook Lee, Kwang-Sub Yoon +2 more |
2003-07-22 |
| 6593441 |
Photosensitive polymer and chemically amplified photoresist composition containing the same |
Sang-jun Choi, Si-hyeung Lee, Sook Lee |
2003-07-15 |
| 6537727 |
Resist composition comprising photosensitive polymer having loctone in its backbone |
Kwang-Sub Yoon, Si-hyeung Lee, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more |
2003-03-25 |
| 6503687 |
Alicyclic photosensitive polymer, resist composition containing the same and method of preparing the resist composition |
Hyun-Woo Kim, Si-hyueng Lee, Ki Young Kwon, Sang-jun Choi, Sang-Gyun Woo |
2003-01-07 |
| 6472120 |
Photosensitive polymer and chemically amplified photoresist composition containing the same |
Sang-jun Choi, Si-hyeung Lee, Sook Lee |
2002-10-29 |
| 6300036 |
Photosensitive polymers and chemically amplified photoresist compositions using the same |
Sang-jun Choi, Yool Kang, Chun-geun Park |
2001-10-09 |
| 6287747 |
Photosensitive polymer having cyclic backbone and resist composition comprising the same |
Sang-jun Choi, Si-hyeung Lee |
2001-09-11 |
| 6280903 |
Chemically amplified resist composition |
Yool Kang, Sang-jun Choi, Chun-geun Park, Young-bum Koh |
2001-08-28 |
| 6277538 |
Photosensitive polymer having cyclic backbone and resist composition comprising the same |
Sang-jun Choi |
2001-08-21 |
| 6114084 |
Chemically amplified resist composition |
Yool Kang, Sang-jun Choi, Chun-geun Park, Young-bum Koh |
2000-09-05 |
