Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6713229 | Terpolymer for amplified resist | Sang-jun Choi, Chun-geun Park | 2004-03-30 |
| 6416927 | Chemically amplified resist compositions | Sang-jun Choi, Chun-geun Park | 2002-07-09 |
| 6280903 | Chemically amplified resist composition | Yool Kang, Sang-jun Choi, Dong-won Jung, Chun-geun Park | 2001-08-28 |
| 6277204 | Methods for cleaning wafers used in integrated circuit devices | Kyu-hwan Chang, Jae-inh Song, Heung-Soo Park | 2001-08-21 |
| 6171754 | Chemically amplified resist compositions | Sang-jun Choi, Chun-geun Park | 2001-01-09 |
| 6114084 | Chemically amplified resist composition | Yool Kang, Sang-jun Choi, Dong-won Jung, Chun-geun Park | 2000-09-05 |
| 6103845 | Chemically amplified resist polymers | Sang-jun Choi, Chun-geun Park | 2000-08-15 |
| 6092539 | In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same | Kyu-hwan Chang, Jae-inh Song, Heung-Soo Park | 2000-07-25 |
| 6043206 | Solutions for cleaning integrated circuit substrates | Jae-inh Song, Moon Hee Lee, Heung-Soo Park | 2000-03-28 |
| 5851727 | Photosensitive polymers and photoresist compositions containing the same | Sang-jun Choi, Chun-geun Park | 1998-12-22 |
| 5789360 | Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same | Jae-inh Song, Young Jun Cho, Heung-Soo Park | 1998-08-04 |