Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6277204 | Methods for cleaning wafers used in integrated circuit devices | Kyu-hwan Chang, Heung-Soo Park, Young-bum Koh | 2001-08-21 |
| 6228739 | Pre-treatment method performed on a semiconductor structure before forming hemi-spherical grains of capacitor storage node | Heon-jae Ha, Hong-Seong Son, Young-ki Hong, Chun-yong Park | 2001-05-08 |
| 6162671 | Method of forming capacitors having high dielectric constant material | Moon Hee Lee, Kyu-hwan Chang, Chang-Lyong Song | 2000-12-19 |
| 6092539 | In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same | Kyu-hwan Chang, Heung-Soo Park, Young-bum Koh | 2000-07-25 |
| 6043206 | Solutions for cleaning integrated circuit substrates | Moon Hee Lee, Heung-Soo Park, Young-bum Koh | 2000-03-28 |
| 5789360 | Cleaning solution for use on a semiconductor wafer following chemical-mechanical polishing of the wafer and method for using same | Young Jun Cho, Heung-Soo Park, Young-bum Koh | 1998-08-04 |