Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9673195 | Semiconductor device having sufficient process margin and method of forming same | Man-Hyoung Ryoo, Gi-Sung Yeo, Gyu-Chul Kim, Sung-Gon Jung, Chang-Min Park +1 more | 2017-06-06 |
| 8193047 | Semiconductor device having sufficient process margin and method of forming same | Man-Hyoung Ryoo, Gi-Sung Yeo, Gyu-Chul Kim, Sung-Gon Jung, Chang-Min Park +1 more | 2012-06-05 |
| 8169012 | Semiconductor device and method of fabricating the semiconductor device | Yong-Kug Bae, Tae-hyuk Ahn, Seok-Hwan Oh | 2012-05-01 |
| 8080886 | Integrated circuit semiconductor device with overlay key and alignment key and method of fabricating the same | Chang-Jin Kang, Myeong-Cheol Kim, Man-Hyoung Ryoo, Doo-Youl Lee | 2011-12-20 |
| 7457058 | Optical element holder and projection exposure apparatus having the same | Woo-Seok Shim, Jung-hyeon Lee, Young-Koog Han, Kwang-Sub Yoon | 2008-11-25 |
| 7381508 | Integrated circuit semiconductor device with overlay key and alignment key and method of fabricating the same | Chang-Jin Kang, Myeong-Cheol Kim, Man-Hyoung Ryoo, Doo-Youl Lee | 2008-06-03 |
| 7259065 | Method of forming trench in semiconductor device | Doo-Hoon Goo, Han-ku Cho, Sang-Gyun Woo, Gi-Sung Yeo | 2007-08-21 |
| 7241552 | Resist composition comprising photosensitive polymer having lactone in its backbone | Kwang-Sub Yoon, Dong-won Jung, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2007-07-10 |
| 7221031 | Semiconductor device having sufficient process margin and method of forming same | Man-Hyoung Ryoo, Gi-Sung Yeo, Gyu-Chul Kim, Sung-Gon Jung, Chang-Min Park +1 more | 2007-05-22 |
| 7084227 | Photosensitive polymer and chemically amplified photoresist composition containing the same | Dong-won Jung, Sang-jun Choi, Sook Lee | 2006-08-01 |
| 7045267 | Resist composition comprising photosensitive polymer having lactone in its backbone | Kwang-Sub Yoon, Dong-won Jung, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2006-05-16 |
| 6893793 | Photosensitive polymer and chemically amplified photoresist composition containing the same | Dong-won Jung, Sang-jun Choi, Sook Lee | 2005-05-17 |
| 6642336 | Photosensitive polymer | Sook Lee, Ki Young Kwon, Kwang-Sub Yoon, Hyun-Woo Kim, Dong-won Jung +2 more | 2003-11-04 |
| 6613492 | Photosensitive polymer having phenyl ring and lactone group and resist composition comprising the same | — | 2003-09-02 |
| 6596459 | Photosensitive polymer and resist composition containing the same | Hyun-Woo Kim, Ki Young Kwon, Dong-won Jung, Sook Lee, Kwang-Sub Yoon +2 more | 2003-07-22 |
| 6593441 | Photosensitive polymer and chemically amplified photoresist composition containing the same | Dong-won Jung, Sang-jun Choi, Sook Lee | 2003-07-15 |
| 6537727 | Resist composition comprising photosensitive polymer having loctone in its backbone | Kwang-Sub Yoon, Dong-won Jung, Hyun-Woo Kim, Sook Lee, Sang-Gyun Woo +1 more | 2003-03-25 |
| 6472120 | Photosensitive polymer and chemically amplified photoresist composition containing the same | Dong-won Jung, Sang-jun Choi, Sook Lee | 2002-10-29 |
| 6287747 | Photosensitive polymer having cyclic backbone and resist composition comprising the same | Sang-jun Choi, Dong-won Jung | 2001-09-11 |
| 6284438 | Method for manufacturing a photoresist pattern defining a small opening and method for manufacturing semiconductor device using the same | Sang-jun Choi, Yool Kang, Joo-tae Moon | 2001-09-04 |