Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7457058 | Optical element holder and projection exposure apparatus having the same | Woo-Seok Shim, Jung-hyeon Lee, Kwang-Sub Yoon, Si-hyeung Lee | 2008-11-25 |
| 7038777 | Semiconductor wafer bearing alignment mark for use in aligning the wafer with exposure equipment, alignment system for producing alignment signals from the alignment mark, and method of determining the aligned state of a wafer from the alignment mark | Young-Chang Kim, Heung-jo Ryuk | 2006-05-02 |
| 6501189 | ALIGNMENT MARK OF SEMICONDUCTOR WAFER FOR USE IN ALIGNING THE WAFER WITH EXPOSURE EQUIPMENT, ALIGNMENT SYSTEM FOR PRODUCING ALIGNMENT SIGNALS FROM THE ALIGNMENT MARK, AND METHOD OF DETERMINING THE ALIGNED STATE OF A WAFER FROM THE ALIGNMENT MARK | Young-Chang Kim, Heung-jo Ryuk | 2002-12-31 |