Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10353290 | Photoresist composition for extreme ultraviolet and method of forming photoresist pattern using the same | Cheol-Hong Park, Chawon Koh, Hyunwoo KIM, Hyejin JEON | 2019-07-16 |
| 10134606 | Method of forming patterns and method of manufacturing integrated circuit device using the same | Hyun-Woo Kim, Ju-hyung An, Jin Young Yoon | 2018-11-20 |
| 9772555 | Methods of forming patterns using photoresists | Cheol-Hong Park, Cha-Won Koh, Hyun-Woo Kim, Sang Min Park | 2017-09-26 |
| 8815697 | Method of fabricating semiconductor device | Jun Ho Yoon, Bong-Jin Kuh, Ki-Chul Kim, Gyung-jin Min, Tae Jin Park +8 more | 2014-08-26 |
| 8125617 | Apparatus and method for manufacturing semiconductor device | Yong-Jin Cho, Seok-Hwan Oh | 2012-02-28 |