Issued Patents All Time
Showing 1–25 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11805407 | Apparatus and method for securely updating binary data in vehicle | — | 2023-10-31 |
| 11685402 | Autonomous driving apparatus and method | Hyuk Lee, Soon Jong Jin, Jun Han Lee | 2023-06-27 |
| 11654939 | Autonomous driving apparatus and method that outputs different warnings based on driving risk | Jun Han Lee, Hyuk Lee, Soon Jong Jin | 2023-05-23 |
| 11615956 | Light generator including debris shielding assembly, photolithographic apparatus including the light generator | — | 2023-03-28 |
| 11560178 | Apparatus and method for displaying rear image of vehicle | — | 2023-01-24 |
| 11479267 | Autonomous driving apparatus and method | Hyuk Lee, Soon Jong Jin, Jun Han Lee | 2022-10-25 |
| 11420653 | Autonomous driving apparatus and method | Hyuk Lee, Jun Han Lee, Soon Jong Jin | 2022-08-23 |
| 11114298 | Light generator including debris shielding assembly, photolithographic apparatus including the light generator, and method of manufacturing integrated circuit device using the photolithographic apparatus | — | 2021-09-07 |
| 10890527 | EUV mask inspection apparatus and method, and EUV mask manufacturing method including EUV mask inspection method | — | 2021-01-12 |
| 10779388 | EUV generation device | — | 2020-09-15 |
| 10733719 | Wafer inspection apparatus and wafer inspection method using the same | Tae-Heung Ahn, Soo Ryonng Kim, Tae-Joong Kim, Jun Bum Park, Jae Chol Joo | 2020-08-04 |
| 10473579 | Apparatus for inspecting material property of plurality of measurement objects | Tae-Heung Ahn, Young-Duk Kim, Sang Gil Park, Jun Bum Park, Yoichiro Iwa | 2019-11-12 |
| 10431505 | Method of inspecting surface having a minute pattern based on detecting light reflected from metal layer on the surface | Jun Bum Park, Kyung-Sik Kang, Jae Chol Joo, Tae-Joong Kim | 2019-10-01 |
| 10338370 | Clock signal generators and substrate inspecting apparatuses having the same | Jun Bum Park, Kyung-Sik Kang, Tae-Joong Kim, Sang Ok Seok | 2019-07-02 |
| 10001444 | Surface inspecting method | Kang-Woong Ko, Sung Yoon Ryu, Young-Hoon Sohn, Gil-woo Song, Tae-Heung Ahn +6 more | 2018-06-19 |
| 9983144 | Plasma light source and inspection apparatus including the same | Kohei Hashimoto, Nobuyuki Kimura, Wook Kim | 2018-05-29 |
| 9903705 | Apparatus for focus control and method for manufacturing semiconductor device | Kwang Soo Kim, Harutaka Sekiya, Kwang-Jun Yoon, Sung Won Park, Young-Duk Kim +1 more | 2018-02-27 |
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Yong-Deok Jeong, Kwang Soo Kim, Yu-Sin Yang, Sang-Kil Lee +1 more | 2018-02-20 |
| 9839110 | Plasma light source apparatus and light source system including the same | Wook Kim, Won-Don Joo, Sung Hwi CHO, Young Kyu Park, Jung Chul Lee +1 more | 2017-12-05 |
| 9746430 | Optical inspecting apparatus | Tae-Joong Kim, Young Kyu Park, Ki-Jung Son, Chang-Hoon Choi | 2017-08-29 |
| 9702826 | Method of inspecting a surface of an object and optical system for performing the same | Kohei Hashimoto, Wook Kim, Chang-Hoon Choi | 2017-07-11 |
| 9546772 | Rod lens for lighting apparatus, lighting apparatus including the same and semiconductor manufacturing method using the apparatus | Kwang Soo Kim, Wook Kim, Tae-Joong Kim | 2017-01-17 |
| 9425036 | Light source device and semiconductor manufacturing apparatus including the same | Wook Kim, Hashimoto Kohei, Won-Don Joo, Kwang Soo Kim, Sue-Jin Cho | 2016-08-23 |
| 9374883 | Plasma light source apparatus and plasma light generating method | Young Kyu Park, Wook Kim, Hashimoto Kohei | 2016-06-21 |
| 9305764 | Plasma light source, inspection apparatus including plasma light source, and method of generating plasma light | Young Kyu Park, Wook Kim, Kwang Soo Kim, Tae-Joong Kim | 2016-04-05 |