Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9897552 | Optical transformation module and optical measurement system, and method of manufacturing a semiconductor device using optical transformation module and optical measurement system | Tae-Joong Kim, Kwang Soo Kim, Byeong Hwan Jeon, Yu-Sin Yang, Sang-Kil Lee +1 more | 2018-02-20 |
| 9267903 | Methods and apparatuses for inspecting semiconductor devices using electron beams | Mira Park, Younghoon Sohn, Yusin Yang, Sangkil Lee | 2016-02-23 |
| 9194816 | Method of detecting a defect of a substrate and apparatus for performing the same | Min Ho Rim, Yu-Sin Yang, Sang-Kil Lee, Hyung-Suk Cho | 2015-11-24 |
| 8759763 | Method and apparatus to measure step height of device using scanning electron microscope | Young-Hoon Sohn, Jin Woo Lee, Yu-Sin Yang, Sang-Kil Lee, Chung-Sam Jun | 2014-06-24 |
| 7034989 | Optical wavelength conversion apparatus and method using injection locking of fabry-perot laser diode | Hark Yoo, Hyuek Jae Lee, Yong Hyub Won, Min Ho Kang | 2006-04-25 |