Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004754 | X-ray topographic apparatus and substrate processing system using the apparatus | Jin-Yeol Yang, Hae-Gu Lee, Dong Su HAN | 2021-05-11 |
| 10504804 | Laser processing method, substrate dicing method and substrate processing system for performing the same | Jin-Yeol Yang, Hae-Gu Lee, Dong Su HAN | 2019-12-10 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Woo-Seok Ko, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung +5 more | 2016-02-16 |
| 8034641 | Method for inspection of defects on a substrate | Woo-Seok Ko, Chung-Sam Jun, Yu-Sin Yang | 2011-10-11 |