Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11004754 | X-ray topographic apparatus and substrate processing system using the apparatus | Hyung-Su Son, Hae-Gu Lee, Dong Su HAN | 2021-05-11 |
| 10504804 | Laser processing method, substrate dicing method and substrate processing system for performing the same | Hyung-Su Son, Hae-Gu Lee, Dong Su HAN | 2019-12-10 |
| 9500599 | Surface inspection apparatus for semiconductor chips | Youn-jo Mun, Hoon Sohn, Sang-Young Kim, Yun-Kyu An, Sung-Il Cho +2 more | 2016-11-22 |
| 9488567 | Pipe damage detection apparatus and method | Hoon Sohn, Hyeon Seok LEE | 2016-11-08 |