Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362139 | Semiconductor inspection apparatus and semiconductor inspection method using the same | Yujin Cho, Jonghyuk Kang, INHYE PARK, Suyoung Lee, Hongche Noh +1 more | 2025-07-15 |
| 12352808 | Substrate inspection apparatus and substrate inspection method | Sekye Jeon, Jinwoo Lee, Jongcheon Sun, Suyoung Lee, Hyeongcheol Lee | 2025-07-08 |
| 12130242 | Inspection system of semiconductor wafer and method of driving the same | Doyoung Yoon, Jeongho Ahn, Dongryul Lee, Dongchul Ihm | 2024-10-29 |
| 11988495 | Through-focus image-based metrology device, operation method thereof, and computing device for executing the operation | Kwangsoo Kim, Sungyoon Ryu, Daejun Park, Seong Jin YUN, Seungryeol Oh +4 more | 2024-05-21 |
| 11754510 | Inspection system of semiconductor wafer and method of driving the same | Doyoung Yoon, Jeongho Ahn, Dongryul Lee, Dongchul Ihm | 2023-09-12 |
| 11754517 | Inspection apparatus for inspecting semiconductor devices using charged particles | Suyoung Lee, Jongmin Kim, Ilsuk Park, Kwangil Shin | 2023-09-12 |
| 10269111 | Method of inspecting semiconductor wafer, an inspection system for performing the same, and a method of fabricating semiconductor device using the same | Joonseo Song, Sung Yoon Ryu, Wahseng Yap, Yunjung Jee, Yusin Yang +3 more | 2019-04-23 |
| 10088297 | Apparatus and method for measuring thickness | Sung Yoon Ryu, Younghoon Sohn, Yusin Yang, Yunjung Jee | 2018-10-02 |
| 9892980 | Fan-out panel level package and method of fabricating the same | Younghoon Sohn, Jinsung Kim, Yusin Yang | 2018-02-13 |
| 9719946 | Ellipsometer and method of inspecting pattern asymmetry using the same | Choonshik Leem | 2017-08-01 |
| 9612212 | Ellipsometer and method of inspecting pattern asymmetry using the same | Choonshik Leem | 2017-04-04 |
| 9583402 | Method of manufacturing a semiconductor device using semiconductor measurement system | Sung Yoon Ryu, Wooseok Ko, Souk Kim, Yusin Yang, Sangkil Lee +1 more | 2017-02-28 |
| 9466537 | Method of inspecting semiconductor device and method of fabricating semiconductor device using the same | Minkook KIM, Wooseok Ko, Yusin Yang, Sangkil Lee | 2016-10-11 |
| 9455121 | Semiconductor inspection system and methods of inspecting a semiconductor device using the same | Hyunwoo KIM, Wooseok Ko, Minkook KIM, Jung-Hwan Kim, Yusin Yang +1 more | 2016-09-27 |