Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10949949 | Non-transitory computer-readable medium and method for monitoring a semiconductor fabrication process | Taelim Choi, Yongdeok Kim | 2021-03-16 |
| 10373882 | Method and system of measuring semiconductor device and method of fabricating semiconductor device using the same | Jihye Lee, Deokyong Kim, Soobok Chin | 2019-08-06 |
| 9991174 | Method and system of measuring semiconductor device and method of fabricating semiconductor device using the same | Jihye Lee, Deokyong Kim, Soobok Chin | 2018-06-05 |
| 9719946 | Ellipsometer and method of inspecting pattern asymmetry using the same | Chungsam Jun | 2017-08-01 |
| 9612212 | Ellipsometer and method of inspecting pattern asymmetry using the same | Chungsam Jun | 2017-04-04 |
| 9360308 | Methods for measuring a thickness of an object | Byung Hyun Hwang, Kwang Hoon Kim, Woongkyu Son, Chulgi Song | 2016-06-07 |