Issued Patents All Time
Showing 26–50 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455206 | Overlay measuring method and system, and method of manufacturing semiconductor device using the same | Seong Jin YUN, Woo-Seok Ko, Sang-Kil Lee, Chung-Sam Jun | 2016-09-27 |
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Woo-Seok Ko, Ho-Jeong Kwak +2 more | 2016-08-16 |
| 9261532 | Conductive atomic force microscope and method of operating the same | Hyun-Woo Kim, Woo-Seok Ko, Young Hwan Kim, Jeong Hoi Kim, Baek-man Sung +5 more | 2016-02-16 |
| 9255694 | Reflector structure of illumination optic system | Won-Don Joo, Woo-Seok Ko, Sue-Jin Cho, Sang Don Jang, Byeong Hwan Jeon | 2016-02-09 |
| 9194816 | Method of detecting a defect of a substrate and apparatus for performing the same | Min Ho Rim, Sang-Kil Lee, Yong-Deok Jeong, Hyung-Suk Cho | 2015-11-24 |
| 9123503 | Methods of fabricating microelectronic substrate inspection equipment | Min Kook Kim, Woo-Seok Ko, Sang-Kil Lee, Chang-Hoon Choi | 2015-09-01 |
| 9036895 | Method of inspecting wafer | Young-Hoon Sohn, Sang-Kil Lee | 2015-05-19 |
| 8902412 | Defect inspection apparatus and defect inspection method using the same | Young-Hoon Sohn, Sang-Kil Lee | 2014-12-02 |
| 8841824 | Broadband light illuminators | Woo-Seok Ko, Sue-Jin Cho, Won-Don Joo, Min Kook Kim, Sang-Kil Lee +1 more | 2014-09-23 |
| 8759763 | Method and apparatus to measure step height of device using scanning electron microscope | Young-Hoon Sohn, Jin Woo Lee, Yong-Deok Jeong, Sang-Kil Lee, Chung-Sam Jun | 2014-06-24 |
| 8729468 | Microelectronic substrate inspection equipment using helium ion microscopy | Min Kook Kim, Woo-Seok Ko, Sang-Kil Lee, Chang-Hoon Choi | 2014-05-20 |
| 8703405 | Methods of generating three-dimensional process window qualification | Young-Hoon Sohn, Sang-Kil Lee | 2014-04-22 |
| 8546154 | Apparatus and method to inspect defect of semiconductor device | Ji-Young Shin, Young-Nam Kim, Jong-An Kim, Hyung-Suk Cho | 2013-10-01 |
| 8184899 | Method of detecting a defect on an object | Kyung-Suk Song, Ji-Hae Kim, Chung-Sam Jun | 2012-05-22 |
| 8126258 | Method of detecting defects in patterns on semiconductor substrate by comparing second image with reference image after acquiring second image from first image and apparatus for performing the same | Chung-Sam Jun, Jong-An Kim, Moon-Shik Kang, Ji Hye Kim | 2012-02-28 |
| 8055056 | Method of detecting defects of patterns on a semiconductor substrate and apparatus for performing the same | Jong-An Kim, Chung-Sam Jun, Moon-Shik Kang, Ji Hye Kim | 2011-11-08 |
| 8055057 | Method for detecting defects in a substrate having a semiconductor device thereon | Moon-Shik Kang, Jong-An Kim, Myung-Sub Lee, Ji Hye Kim | 2011-11-08 |
| 8050488 | Method of analyzing a wafer sample | Jong-An Kim, Chung-Sam Jun, Moon-Shik Kang, Ji Hye Kim | 2011-11-01 |
| 8034641 | Method for inspection of defects on a substrate | Woo-Seok Ko, Chung-Sam Jun, Hyung-Su Son | 2011-10-11 |
| 8034640 | Apparatus and method to inspect defect of semiconductor device | Ji-Young Shin, Young-Nam Kim, Jong-An Kim, Hyung-Suk Cho | 2011-10-11 |
| 7804591 | Wafer inspecting method | Ji Hye Kim, Jong-An Kim, Moon-Shik Kang, Ji-Young Shin | 2010-09-28 |
| 7697130 | Apparatus and method for inspecting a surface of a wafer | Woo-Seok Ko, Young-Jee Yoon, Chung-Sam Jun | 2010-04-13 |
| 7573568 | Method and apparatus for detecting a photolithography processing error, and method and apparatus for monitoring a photolithography process | Chung-Sam Jun, Sang-Mun Chon, Sun-Yong Choi | 2009-08-11 |
| 7486392 | Method of inspecting for defects and apparatus for performing the method | Chung-Sam Jun, Ki-Suk Chung, Tae-Sung Kim, Byung-Sug Lee | 2009-02-03 |
| 7446865 | Method of classifying defects | Ki-Suk Chung, Chung-Sam Jun, Byung-Sug Lee, Ji-Young Shin, Tae-Sung Kim | 2008-11-04 |