Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7433032 | Method and apparatus for inspecting defects in multiple regions with different parameters | Joung Soo Kim, Sang-Mun Chon, Chung-Sam Jun | 2008-10-07 |
| 7428328 | Method of forming a three-dimensional image of a pattern to be inspected and apparatus for performing the same | Yun-Jung Jee, Chung-Sam Jun, Tae Kyoung Kim | 2008-09-23 |
| 7426031 | Method and apparatus for inspecting target defects on a wafer | Moon-kyung Kim, Chung-Sam Jun | 2008-09-16 |
| 7394279 | Method of measuring a surface voltage of an insulating layer | Mi-Sung Lee, Chung-Sam Jun, Byung-Sug Lee | 2008-07-01 |
| 7385689 | Method and apparatus for inspecting substrate pattern | Kye-Weon Kim, Chung-Sam Jun, Ki-Suk Chung, Sang-Mun Chon, Seong Jin Kim +1 more | 2008-06-10 |
| 7310140 | Method and apparatus for inspecting a wafer surface | Tae-Min Eom, Chung-Sam Jun, Yun-Jung Jee, Joung Soo Kim, Moon-kyung Kim +2 more | 2007-12-18 |
| 7271890 | Method and apparatus for inspecting defects | Joung Soo Kim, Moon-kyung Kim, Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun | 2007-09-18 |
| 7186280 | Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method | Tae-Min Eom, Chung-Sam Jun, Yun-Jung Jee | 2007-03-06 |
| 7113274 | Method and apparatus for inspecting a substrate | Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun | 2006-09-26 |
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Kwan-Woo Ryu, Park-Song Kim, Sang-Mun Chon, Sun-Yong Choi +1 more | 2005-08-09 |
| 6911662 | Chemical-mechanical polishing apparatus and method for controlling the same | Kyoung Woo Kim | 2005-06-28 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun, Kwan-Woo Ryu, Park-Song Kim +1 more | 2005-03-22 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Kye-Weon Kim, Sang Hoon Lee +2 more | 2005-03-22 |
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Chung-Sam Jun, Kye-Weon Kim, Hyo-Hoo Kim | 2005-02-01 |
| 6803241 | Method of monitoring contact hole of integrated circuit using corona charges | Tae-Min Eom, Chung-Sam Jun | 2004-10-12 |
| 6650408 | Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus | Chung-Sam Jun, Kye-Weon Kim, Hyo-Hoo Kim | 2003-11-18 |