| 8138057 |
Metal oxide alloy layer, method of forming the metal oxide alloy layer, and methods of manufacturing a gate structure and a capacitor including the metal oxide alloy layer |
Jung-Ho Lee, Jung-Sik Choi, Jun-Hyun Cho, Ji Hyun Lee |
2012-03-20 |
| 7427573 |
Forming composite metal oxide layer with hafnium oxide and titanium oxide |
Jung-Ho Lee, Jung-Sik Choi, Jun-Hyun Cho, Ji Hyun Lee |
2008-09-23 |
| 7310140 |
Method and apparatus for inspecting a wafer surface |
Yu-Sin Yang, Chung-Sam Jun, Yun-Jung Jee, Joung Soo Kim, Moon-kyung Kim +2 more |
2007-12-18 |
| 7186280 |
Method of inspecting a leakage current characteristic of a dielectric layer and apparatus for performing the method |
Chung-Sam Jun, Yu-Sin Yang, Yun-Jung Jee |
2007-03-06 |
| 6927077 |
Method and apparatus for measuring contamination of a semiconductor substrate |
Yu-Sin Yang, Kwan-Woo Ryu, Park-Song Kim, Sang-Mun Chon, Sun-Yong Choi +1 more |
2005-08-09 |
| 6869215 |
Method and apparatus for detecting contaminants in ion-implanted wafer |
Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun, Kwan-Woo Ryu +1 more |
2005-03-22 |
| 6803241 |
Method of monitoring contact hole of integrated circuit using corona charges |
Chung-Sam Jun, Yu-Sin Yang |
2004-10-12 |
