Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417055 | Apparatus for measuring thickness of thin film, system including the apparatus, and method for measuring thickness of thin film | Sung Yoon Ryu, Sang-Kil Lee, Chung-Sam Jun, Woo-Seok Ko, Ho-Jeong Kwak +2 more | 2016-08-16 |
| 9255789 | Method for measuring thickness of object | Jang-Ik Park, Il Nam | 2016-02-09 |
| 8551791 | Apparatus and method for manufacturing semiconductor devices through layer material dimension analysis | Jang-Ik Park, Chung-Sam Jun, Hwan-Shik Park, Ji Hye Kim, Kong-Jung Sa +1 more | 2013-10-08 |
| 7186577 | Method for monitoring a density profile of impurities | Yun-Jung Jee, Sun-Yong Choi, Chung-Sam Jun | 2007-03-06 |
| 6927077 | Method and apparatus for measuring contamination of a semiconductor substrate | Tae-Min Eom, Yu-Sin Yang, Park-Song Kim, Sang-Mun Chon, Sun-Yong Choi +1 more | 2005-08-09 |
| 6869215 | Method and apparatus for detecting contaminants in ion-implanted wafer | Yu-Sin Yang, Sang-Mun Chon, Sun-Yong Choi, Chung-Sam Jun, Park-Song Kim +1 more | 2005-03-22 |