Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7385689 | Method and apparatus for inspecting substrate pattern | Chung-Sam Jun, Ki-Suk Chung, Sang-Mun Chon, Seong Jin Kim, Byung-Sug Lee +1 more | 2008-06-10 |
| 7355729 | Apparatus and method for measuring a thickness of a substrate | Hwan-Shik Park, Sun-Yong Choi, Chung-Sam Jun | 2008-04-08 |
| 7081952 | Method and apparatus for obtaining an image using a selective combination of wavelengths of light | Chung-Sam Jun, Hyun-Tae Kang | 2006-07-25 |
| 6870948 | Method and apparatus for numerically analyzing grain growth on semiconductor wafer using SEM image | Chung-Sam Jun, Sang-Mun Chon, Sang-bong Choi, Sang Hoon Lee, Yu-Sin Yang +2 more | 2005-03-22 |
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Chung-Sam Jun, Yu-Sin Yang, Hyo-Hoo Kim | 2005-02-01 |
| 6650408 | Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus | Chung-Sam Jun, Yu-Sin Yang, Hyo-Hoo Kim | 2003-11-18 |