Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7693682 | Method for measuring critical dimensions of a pattern using an overlay measuring apparatus | Jeong-hee Cho, Jang Hoon Kim, Ki-Hyun Chyun | 2010-04-06 |
| 7081952 | Method and apparatus for obtaining an image using a selective combination of wavelengths of light | Kye-Weon Kim, Chung-Sam Jun | 2006-07-25 |
| 6826743 | Method for automatically correcting overlay alignment of a semiconductor wafer | Chan Hoon Park, Bong Su Cho | 2004-11-30 |