Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7693682 | Method for measuring critical dimensions of a pattern using an overlay measuring apparatus | Jeong-hee Cho, Hyun-Tae Kang, Jang Hoon Kim | 2010-04-06 |
| 7594969 | Device for controlling dispensing error in photo spinner equipment | Jong-Hwa Lee, Chan Hoon Park | 2009-09-29 |
| 5791709 | Semiconductor manufacturing apparatus having suctorial means for handling wafers | Yong-su Kim | 1998-08-11 |