Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6850332 | Method for measuring step difference in a semiconductor device and apparatus for performing the same | Chung-Sam Jun, Kye-Weon Kim, Yu-Sin Yang | 2005-02-01 |
| 6650408 | Method for inspecting a polishing pad in a semiconductor manufacturing process, an apparatus for performing the method, and a polishing device adopting the apparatus | Chung-Sam Jun, Kye-Weon Kim, Yu-Sin Yang | 2003-11-18 |