| 8007676 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Bong-Su Ahn, Kyoung-Moon Kang |
2011-08-30 |
| 7858527 |
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition |
Nam-Soo Kim, Sang-Mun Chon, Young-Sam Lim, Kyoung-Moon Kang, Sei-Cheol Lee +1 more |
2010-12-28 |
| 7662022 |
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Kyoung-Moon Kang |
2010-02-16 |
| 7442111 |
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Kyoung-Moon Kang |
2008-10-28 |
| 7429367 |
Method for producing improved cerium oxide abrasive particles and compositions including such particles |
Dong-Jun Lee, Kyoung-Moon Kang, Nam-Soo Kim |
2008-09-30 |
| 7402261 |
Slurry compositions, methods of preparing slurry compositions, and methods of polishing an object using slurry compositions |
Sung-Taek Moon, Dong-Jun Lee, Nam-Soo Kim, Bong-Su Ahn, Kyoung-Moon Kang |
2008-07-22 |
| 7288212 |
Additive composition, slurry composition including the same, and method of polishing an object using the slurry composition |
Nam-Soo Kim, Sang-Mun Chon, Young-Sam Lim, Kyoung-Moon Kang, Sei-Cheol Lee +1 more |
2007-10-30 |
| 7261621 |
Pad conditioner for chemical mechanical polishing apparatus |
Sung-Taok Moon, Dong-Jun Lee, Kyoung-Moon Kang, Bong-Su Ahn |
2007-08-28 |
| 7229337 |
Polishing pad, platen, method of monitoring, method of manufacturing, and method of detecting |
Young-Sam Lim, Dong-Jun Lee, Nam-Soo Kim, Sung-Taek Moon, Kyoung-Moon Kang |
2007-06-12 |
| 6432151 |
Preparing method of silica slurry for wafer polishing |
Min-Ho Oh, Sun Hyuck Bae, Seung-Man Yang, Do Hyun Kim |
2002-08-13 |
