Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429283 | Method and apparatus for treating a substrate | Hae-Won Choi, Anton Koriakin, Joon Ho WON, Min Woo KIM, Ki Hoon CHOI +4 more | 2025-09-30 |
| 11940734 | Apparatus and method for treating substrate | Ki Hoon CHOI, Eung Su Kim, Pil Kyun HEO, Hae-Won Choi, Anton Koriakin +1 more | 2024-03-26 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |