Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429283 | Method and apparatus for treating a substrate | Hae-Won Choi, Anton Koriakin, Joon Ho WON, Min Woo KIM, Ki Hoon CHOI +4 more | 2025-09-30 |
| 12337356 | Moving assembly for recovery guard and substrate processing apparatus | Won Sik SON, Ho Jong HWANG | 2025-06-24 |
| 12300519 | Surface treatment method | Jung Suk GOH, Sun Mi Kim, Ji Su Hong, Kuk Saeng KIM, Cheng Bin CUI | 2025-05-13 |
| 12094733 | Substrate treatment apparatus | Young Dae CHUNG, Won Geun KIM, Jee Young Lee, Ji Hoon Jeong, Tae Shin KIM +2 more | 2024-09-17 |
| 12046466 | Method and apparatus for treating substrate | Yong Jun SEO, Hyun YOON, Jungsuk Goh, Byeong Geun Kim, Yoonki SA +6 more | 2024-07-23 |
| 11940734 | Apparatus and method for treating substrate | Ki Hoon CHOI, Eung Su Kim, Jin Yeong SUNG, Hae-Won Choi, Anton Koriakin +1 more | 2024-03-26 |
| 11923216 | Apparatus and method for treating substrate including process chambers and transfer chamber | Seung Min Shin, Sang Jin Park, Hae-Won Choi, Jang Jin LEE, Ji Hwan Park +4 more | 2024-03-05 |
| 11887883 | Heterogeneous composite material and method for producing the same | Do Yeon Kim, Ho Jong HWANG, Hyun Yoon, Jong Min Lee, Chul Baik | 2024-01-30 |
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Won Geun KIM, Ju-Mi Lee, Ho Jong HWANG +3 more | 2023-10-31 |
| 11764084 | Surface treatment apparatus and surface treatment method | Jung Suk GOH, Sun Mi Kim, Ji Su Hong, Kuk Saeng KIM, Cheng Bin CUI | 2023-09-19 |
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jihwan LEE, Jungbong Choi, Chan Young Heo | 2023-06-20 |
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more | 2022-11-08 |