| 12317419 |
Apparatus for temperature measurement and method of processing substrate |
Sang Hyun SON, Su Jin CHAE, Dong Ok AHN |
2025-05-27 |
| 12224189 |
Substrate type sensor and method of measuring the impact point and the impact force of chemical |
Young Seop CHOI, Sang Hyun SON, Jun Gwon Lee, Hak Hyon Kim, Sun-Yong Park |
2025-02-11 |
| 12061097 |
Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium |
Young Seop CHOI, Sang Hyun SON, Sang Min Lee, Jong Hyeon Woo, Hwan Bin Kim |
2024-08-13 |
| 12046466 |
Method and apparatus for treating substrate |
Hyun YOON, Jungsuk Goh, Byeong Geun Kim, Yoonki SA, Doyeon KIM +6 more |
2024-07-23 |
| 11933808 |
Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere |
Young Seop CHOI, Sang Hyun SON, Ji-Young Lee, Gyeong Ryul Kim, Sun-Yong Park |
2024-03-19 |
| 11923219 |
Apparatus for treating substrate |
Youngseop Choi, Young-Hun Lee, Bok Kyu LEE, Miso PARK |
2024-03-05 |
| 11756815 |
Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor |
Sang Hyun SON, Sang Min HA, Dong Ok AHN |
2023-09-12 |
| 11703520 |
Wafer type sensor unit and data acquisition method using the wafer type sensor unit |
Sang Hyun SON, Ji Su Hong, Jae-Myoung Lee, Dong Ok AHN |
2023-07-18 |
| 11697380 |
System and method for displaying vehicle driving information |
Woo Sung Lee, Geon Pyo Kim, Hyun-Ho Park, Kwang-Ho Jung, Ki Hun Bang |
2023-07-11 |
| 11495467 |
Method and apparatus for etching thin layer |
Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more |
2022-11-08 |