Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12234555 | Substrate treating apparatus and filler member provided therein | Jin Mo JAE, Seung Hoon Oh, Young Seop CHOI, Mi So PARK | 2025-02-25 |
| 12061097 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Young Seop CHOI, Yong Jun SEO, Sang Hyun SON, Sang Min Lee, Hwan Bin Kim | 2024-08-13 |
| 11511321 | Substrate processing method and substrate processing apparatus | Young Jin Kim, Jin Tack Yu, Bu Young JUNG, Byung Sun BANG, Seung Hoon Oh +1 more | 2022-11-29 |
| 11361962 | Method and apparatus for processing substrate | Seung Hoon Oh, Jin Tack Yu, Bu Young JUNG, Byung Sun BANG, Young Jin Kim +1 more | 2022-06-14 |