Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12234555 | Substrate treating apparatus and filler member provided therein | Jin Mo JAE, Seung Hoon Oh, Mi So PARK, Jong Hyeon Woo | 2025-02-25 |
| 12224189 | Substrate type sensor and method of measuring the impact point and the impact force of chemical | Yong Jun SEO, Sang Hyun SON, Jun Gwon Lee, Hak Hyon Kim, Sun-Yong Park | 2025-02-11 |
| 12061097 | Substrate type sensor for measuring horizontality of substrate support member provided in atmosphere accompanied by temperature change, method for measuring horizontality of substrate support member by using the same, and non-transitory computer readable medium | Yong Jun SEO, Sang Hyun SON, Sang Min Lee, Jong Hyeon Woo, Hwan Bin Kim | 2024-08-13 |
| 11933808 | Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere | Yong Jun SEO, Sang Hyun SON, Ji-Young Lee, Gyeong Ryul Kim, Sun-Yong Park | 2024-03-19 |
| 10093677 | Method for preparing spiro quaternary ammonium salt | Myeng Chan Hong, Seung Hun Lee, Da Eun Kwon, So-Hyun Jang, June Hyeop An +1 more | 2018-10-09 |
| 9802150 | Carbon dioxide absorbent based on amine having nitrile functional group, and carbon dioxide absorption method and separation method using same | Hoon Kim, Youngeun Cheon, Heehwan Kim | 2017-10-31 |