Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11933808 | Buffer unit and method for storaging substrate type sensor for measuring of horizontality of a substrate support member provided on a temperature varying atmosphere | Young Seop CHOI, Yong Jun SEO, Sang Hyun SON, Ji-Young Lee, Sun-Yong Park | 2024-03-19 |