Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12317419 | Apparatus for temperature measurement and method of processing substrate | Yong Jun SEO, Sang Hyun SON, Su Jin CHAE | 2025-05-27 |
| 11756815 | Apparatus for and method of monitoring warpage of substrate, substrate treatment apparatus, and substrate-type sensor | Yong Jun SEO, Sang Hyun SON, Sang Min HA | 2023-09-12 |
| 11703520 | Wafer type sensor unit and data acquisition method using the wafer type sensor unit | Yong Jun SEO, Sang Hyun SON, Ji Su Hong, Jae-Myoung Lee | 2023-07-18 |
| 11577506 | Apparatus and method for inspecting droplet | Kwang Sup Kim, Jong Min Lee, Jun Ho Oh, Ji Hoon Yoo, Young Ho Park | 2023-02-14 |