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Apparatus for temperature measurement and method of processing substrate |
Yong Jun SEO, Sang Hyun SON, Dong Ok AHN |
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Electronic device and method for fabricating the same |
Chi-Ho Kim, Min KANG, Hyun-Seok Kang, Hyo-June Kim, Jae-Geun Oh |
2022-03-08 |
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Memory device and electronic device including insulating patterns with different thermal conductivities |
Dae-Gun Kang, Hyun-Seok Kang, Deok Lae AHN, Jae-Geun Oh, Won Ki Joo |
2021-11-30 |
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Electronic device and method for fabricating the same |
Dae-Gun Kang, Sung-Kyu Min, Myoung-Sub Kim, Chi-Ho Kim, Su Yeon Lee |
2020-01-28 |
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3D semiconductor integrated circuit device and method of manufacturing the same |
Jin Ha Kim, Jun Kwan Kim, Kang Sik CHOI, Young-Ho Lee |
2018-04-03 |
| 9543401 |
3D semiconductor integrated circuit device and method of manufacturing the same |
Jin Ha Kim, Jun Kwan Kim, Kang Sik CHOI, Young-Ho Lee |
2017-01-10 |
| 9306166 |
Fabrication method of resistance variable memory apparatus |
Jun Kwan Kim, Young-Ho Lee |
2016-04-05 |
| 9006073 |
Fabrication method of phase change memory device having self-aligned bottom electrode |
Jin-Hyock Kim, Young Seok Kwon |
2015-04-14 |
| 8748860 |
Phase change memory device having self-aligned bottom electrode and fabrication method thereof |
Jin-Hyock Kim, Young Seok Kwon |
2014-06-10 |
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Phase change memory device and fabrication method thereof |
Keum Bum Lee, Hye Jin Seo |
2013-12-17 |
| 8049199 |
Phase change memory device and method for manufacturing the same |
Yong Seok Eun, Keum Bum Lee, Heon Yong Chang, Min Yong Lee |
2011-11-01 |
| 7772101 |
Phase-change memory device and method for manufacturing the same |
Keum Bum Lee, Min Yong Lee |
2010-08-10 |
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Capacitor with nanotubes and method for fabricating the same |
Eun A. Lee, Ho Jin Cho, Young-Dae Kim, Jun Soo Chang, Hai Won Kim |
2010-03-30 |
| 7463476 |
Capacitor with nanotubes and method for fabricating the same |
Eun A. Lee, Ho Jin Cho, Young-Dae Kim, Jun Soo Chang, Hai Won Kim |
2008-12-09 |
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Method for manufacturing capacitor of semiconductor element |
Ho Jin Cho, Jun Soo Chang, Eun A. Lee, Young-Dae Kim |
2007-11-27 |
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Method for fabricating contact plug with low contact resistance |
Hai Won Kim |
2005-03-22 |