Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12381084 | Apparatus and method for treating substrate | Ki Hoon CHOI, Tae Hee Kim, Hyo Won YANG, Young Dae CHUNG, Ji Hoon Jeong | 2025-08-05 |
| 12366799 | Apparatus for correcting photomask and method thereof | Hyo Won YANG, Ji Hoon Jeong, In Ki JUNG, Ki Hoon CHOI, Tae Hee Kim +1 more | 2025-07-22 |
| 12237181 | Support unit and substrate treating apparatus | Ho Jong HWANG, Do Yeon Kim | 2025-02-25 |
| 12217553 | Transport vehicle management method | Tae In Kim, Tae Uk PARK | 2025-02-04 |
| 12142493 | Substrate processing apparatus and substrate processing method | Young Jun SON, Tae Hoon Lee, Sung Gyu LEE, Do Yeon Kim | 2024-11-12 |
| 12046466 | Method and apparatus for treating substrate | Yong Jun SEO, Jungsuk Goh, Byeong Geun Kim, Yoonki SA, Doyeon KIM +6 more | 2024-07-23 |
| 11961695 | Substrate treating apparatus, ion implantation apparatus, and ion implantation method | Doyeon KIM, Ho Jong HWANG | 2024-04-16 |
| 11960236 | Home port and substrate processing apparatus using same | Young Jun SON, Tae Hoon Lee, Do Yeon Kim | 2024-04-16 |
| 11804371 | Substrate treatment apparatus and method of performing treatment process on substrate | Do Yeon Kim, Se-hoon Oh, Won Geun KIM, Ju-Mi Lee, Ho Jong HWANG +3 more | 2023-10-31 |
| 11495467 | Method and apparatus for etching thin layer | Jung Suk GOH, Jae Seong LEE, Do Youn LIM, Kuk Saeng KIM, Young Dae CHUNG +12 more | 2022-11-08 |
| 7620657 | Method and system for registering and retrieving production information | Jung Eun Lee, Jin Ho Jung, Joo Myung Jeong | 2009-11-17 |