Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198943 | Substrate processing apparatus, process fluid treating apparatus, and ozone decomposition method | Seung-Hwan Cho | 2025-01-14 |
| 10453672 | Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate | Byungsun Bang, Kilsung KWON | 2019-10-22 |