| 12290876 |
Film removing method, substrate treating method, and substrate treating apparatus |
Soo Young Park, Jun Keon Ahn, Jung Hwan Lee, Seong-soo Lee |
2025-05-06 |
| 12236574 |
Substrate treating apparatus and substrate treating method |
Soo Yeon Shin, Jihyun Lee, Chang Yul Cho |
2025-02-25 |
| 12112960 |
Apparatus for processing substrate and method of determining whether substrate treatment process is normal |
Soo Yeon Shin, Hyun Hoo KIM, Myung Chan CHO |
2024-10-08 |
| 11972939 |
Method and apparatus for treating substrate |
Jun Keon Ahn, Soo Young Park, Jung Hwan Lee |
2024-04-30 |
| 11869763 |
Apparatus and system for treating substrate |
Jun Keon Ahn, Soo Young Park, Jung Hwan Lee, Seungtae YANG |
2024-01-09 |
| 11745291 |
Apparatus and method for processing substrate |
Jun Keon Ahn, Byungsun Bang |
2023-09-05 |
| 11679447 |
Apparatus and method for treating substrate |
Soo Young Park, Jun Keon Ahn, Jung Hwan Lee |
2023-06-20 |
| 11387127 |
Substrate treating apparatus and substrate transfer apparatus |
Jung Hwan Lee, Soo Young Park |
2022-07-12 |
| 11367634 |
Substrate treating apparatus with edge treating unit and substrate treating method |
Jihyun Lee, Young Ho Choo |
2022-06-21 |
| 11158079 |
Substrate treating apparatus and apparatus and method for eccentricity inspection |
Soo Young Park, Jihyun Lee, Young Ho Choo |
2021-10-26 |
| 10757331 |
Camera posture estimation method and substrate processing apparatus |
Sungyong Chun, Sung-Wook Bae |
2020-08-25 |