Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12290876 | Film removing method, substrate treating method, and substrate treating apparatus | Soo Young Park, Jun Keon Ahn, Jung Hwan Lee, Seong-soo Lee | 2025-05-06 |
| 12236574 | Substrate treating apparatus and substrate treating method | Soo Yeon Shin, Jihyun Lee, Chang Yul Cho | 2025-02-25 |
| 12112960 | Apparatus for processing substrate and method of determining whether substrate treatment process is normal | Soo Yeon Shin, Hyun Hoo KIM, Myung Chan CHO | 2024-10-08 |
| 11972939 | Method and apparatus for treating substrate | Jun Keon Ahn, Soo Young Park, Jung Hwan Lee | 2024-04-30 |
| 11869763 | Apparatus and system for treating substrate | Jun Keon Ahn, Soo Young Park, Jung Hwan Lee, Seungtae YANG | 2024-01-09 |
| 11745291 | Apparatus and method for processing substrate | Jun Keon Ahn, Byungsun Bang | 2023-09-05 |
| 11679447 | Apparatus and method for treating substrate | Soo Young Park, Jun Keon Ahn, Jung Hwan Lee | 2023-06-20 |
| 11387127 | Substrate treating apparatus and substrate transfer apparatus | Jung Hwan Lee, Soo Young Park | 2022-07-12 |
| 11367634 | Substrate treating apparatus with edge treating unit and substrate treating method | Jihyun Lee, Young Ho Choo | 2022-06-21 |
| 11158079 | Substrate treating apparatus and apparatus and method for eccentricity inspection | Soo Young Park, Jihyun Lee, Young Ho Choo | 2021-10-26 |
| 10757331 | Camera posture estimation method and substrate processing apparatus | Sungyong Chun, Sung-Wook Bae | 2020-08-25 |