Substrate support unit and substrate treating apparatus having the same

Assignee

• Semes Co.

Inventors

• Inhwang PARK (2 patents)
• Gui Su PARK (12 patents)
• Young-Hun Lee (68 patents)
• Youngseop Choi (4 patents)
• Seung Hoon Oh (66 patents)
• Jonghyeon Woo (3 patents)
• Jin Mo JAE (5 patents)

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