Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10942446 | Mask cleaning apparatus and method for cleaning mask | Seong-soo Lee, Jeong Yeong Park, Sung-Bum Park | 2021-03-09 |
| 9892939 | Substrate treating apparatus and chemical recycling method | Jaeryung Ryu, Dong-Soon Hwang | 2018-02-13 |
| 9349626 | Buffer units, substrate processing apparatuses, and substrate processing methods | Kihoon Choi, Byung Man Kang, Donghyuk Jang | 2016-05-24 |
| 9153464 | Substrate processing apparatus and substrate processing method | Byung Man Kang, Donghyuk Jang, Seong-Soo Kim | 2015-10-06 |
| 8673110 | Solution supplying unit and substrate treating apparatus having the same | Gui Su PARK, Hwan-lk Noh, Won-Pil Cho | 2014-03-18 |
| 7896051 | Semiconductor die bonding apparatus having multiple bonding head units | Kwang Duck Koh, Jum Dong Lee, Hwa Seob Lee, Jae Moo Shin | 2011-03-01 |