Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10942446 | Mask cleaning apparatus and method for cleaning mask | Seong-soo Lee, Sung-Bum Park, Byung Chul Kang | 2021-03-09 |
| 10460923 | Apparatus and method for treating substrate | Young Ha Kim, Se Jeong Choi, Kang Suk Lee, Kiyoung Kwark, Jeoung Eun Park | 2019-10-29 |