Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9892939 | Substrate treating apparatus and chemical recycling method | Jaeryung Ryu, Byung Chul Kang | 2018-02-13 |
| 8297293 | Substrate support unit, and substrate treating apparatus and method using the same | Tae In Kim, Sung Jin Hong | 2012-10-30 |